Just as circuit metallization must evolve to manage resistance as features shrink, so must the dielectric half of the interconnect stack. For quite some time, manufacturers have needed a dielectric ...
High-κ dielectrics have been actively pursued to replace SiO 2 as gate insulators for silicon devices 1. The relatively low κ of SiO 2 (at 3.9) limits its use in transistors as gate lengths scale down ...
The invention of the transistor was a significant breakthrough that altered the course of history for the electronics and computer industries. They are an inseparable part of any electronic device ...
Polymer-based dielectrics are widely used in different electrical and electronic devices like capacitors, power transmission cables, and microchips. To adapt to different working conditions, a range ...
“Using first-principles calculations, we investigate six transition-metal nitride halides (TMNHs): HfNBr, HfNCl, TiNBr, TiNCl, ZrNBr, and ZrNCl as potential van der Waals (vdW) dielectrics for ...
While one group of companies is hard at work developing new high-k dielectrics, another group is working to come up with semiconductor etching and cleaning chemistries that complement these exotic new ...
Silicon Austria Labs (SAL) has received its Centura PECVD tool from Applied Materials, supporting dielectrics deposition for RF circulators on 200mm wafers. The tool is in commissioning phase and ...
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